Implementing a New Genetic Algorithm To Solve the Capacity Allocation Problem in the Photolithography Area
| dc.contributor.author | Ghasemi A. | |
| dc.contributor.author | Heavey C. | |
| dc.contributor.author | Kabak K.E. | |
| dc.date.accessioned | 2023-06-16T15:01:53Z | |
| dc.date.available | 2023-06-16T15:01:53Z | |
| dc.date.issued | 2019 | |
| dc.description | Arena;Bayer;Chalmers;et al.;Simio;The AnyLogic Company | en_US |
| dc.description | 2018 Winter Simulation Conference, WSC 2018 -- 9 December 2018 through 12 December 2018 -- 144832 | en_US |
| dc.description.abstract | Photolithography plays a key role in semiconductor manufacturing systems. In this paper, we address the capacity allocation problem in the photolithography area (CAPPA) subject to machine dedication and tool capability constraints. After proposing the mathematical model of the considered problem, we present a new genetic algorithm named RGA which was derived from a psychological concept called Reference Group in society. Finally, to evaluate the efficiency of the algorithm, we solve a real case study problem from a semiconductor manufacturing company in Ireland and compare the results with one of the genetic algorithms proposed in the literature. Results show the effectiveness and efficiency of RGA to solve CAPPA in a reasonable time. © 2018 IEEE | en_US |
| dc.description.sponsorship | Horizon 2020 Framework Programme, H2020: 737459; Horizon 2020; Electro Medical Systems, EMS; Electronic Components and Systems for European Leadership, ECSEL | en_US |
| dc.description.sponsorship | This project named Productive 4.0 has received funding from the Electronic Component Systems for European Leadership Joint Undertaking under grant agreement No 737459. This Joint Undertaking receives support from the European Union’s Horizon 2020 research and innovation program and Germany, Austria, France, Czech Republic, Netherlands, Belgium, Spain, Greece, Sweden, Italy, Ireland, Poland, Hungary, Portugal, Denmark, Finland, Luxembourg, Norway, Turkey. | en_US |
| dc.description.sponsorship | This project named Productive 4.0 has received funding from the Electronic Component Systems for European Leadership Joint Undertaking under grant agreement No 737459. This Joint Undertaking receives support from the European Union's Horizon 2020 research and innovation program and Germany, Austria, France, Czech Republic, Netherlands, Belgium, Spain, Greece, Sweden, Italy, Ireland, Poland, Hungary, Portugal, Denmark, Finland, Luxembourg, Norway, Turkey. | en_US |
| dc.identifier.doi | 10.1109/WSC.2018.8632204 | |
| dc.identifier.isbn | 9.78E+12 | |
| dc.identifier.issn | 0891-7736 | |
| dc.identifier.scopus | 2-s2.0-85062598473 | |
| dc.identifier.uri | https://doi.org/10.1109/WSC.2018.8632204 | |
| dc.identifier.uri | https://hdl.handle.net/20.500.14365/3659 | |
| dc.language.iso | en | en_US |
| dc.publisher | Institute of Electrical and Electronics Engineers Inc. | en_US |
| dc.relation.ispartof | Proceedings - Winter Simulation Conference | en_US |
| dc.rights | info:eu-repo/semantics/closedAccess | en_US |
| dc.subject | Efficiency | en_US |
| dc.subject | Genetic algorithms | en_US |
| dc.subject | Photolithography | en_US |
| dc.subject | Capacity allocation | en_US |
| dc.subject | Effectiveness and efficiencies | en_US |
| dc.subject | Machine dedication | en_US |
| dc.subject | New genetic algorithms | en_US |
| dc.subject | Real case | en_US |
| dc.subject | Reference group | en_US |
| dc.subject | Semiconductor manufacturing | en_US |
| dc.subject | Semiconductor manufacturing systems | en_US |
| dc.subject | Semiconductor device manufacture | en_US |
| dc.title | Implementing a New Genetic Algorithm To Solve the Capacity Allocation Problem in the Photolithography Area | en_US |
| dc.type | Conference Object | en_US |
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| gdc.description.departmenttemp | Ghasemi, A., Enterprise Research Center, University Of Limerick, Castletroy Limerick, V94 T9PX, Ireland; Heavey, C., Enterprise Research Center, University Of Limerick, Castletroy Limerick, V94 T9PX, Ireland; Kabak, K.E., Department of Industrial Engineering, Izmir University Of Economics, Sakarya Caddesi, No:156, Balçova - İzmir, 35330, Turkey | en_US |
| gdc.description.endpage | 3707 | en_US |
| gdc.description.publicationcategory | Konferans Öğesi - Uluslararası - Kurum Öğretim Elemanı | en_US |
| gdc.description.scopusquality | Q4 | |
| gdc.description.startpage | 3696 | en_US |
| gdc.description.volume | 2018-December | en_US |
| gdc.description.wosquality | N/A | |
| gdc.identifier.openalex | W4235419533 | |
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| gdc.virtual.author | Kabak, Kamil Erkan | |
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